FC280 / FC380 Series Mass Flow Controller

Process Values
Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC280SA and FM380SA models are premium quality elastomer-sealed mass flow controllers and meters. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.

Download PDF Catalog

FC-2900/FM-3900 Series

Process Values
Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC2900 and FM3900 models are premium quality elastomer-sealed mass flow controllers and meters. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.

Download PDF Catalog

Tylan FC-2920/FM-3920 Series

Process Values
The Tylan FC2920 mass flow controllers and the Tylan FM3920 flowmeters accurately and reliably measure and control the mass flow rate of gases up to 200 slm (420 scfh) of nitrogen equivalents. The Tylan FC2921 offers a 15-pin D connector with optional 4-20 mA DC signals. The Tylan FM3920 and FM3921 flowmeters have the same specifications and dimensions as the Tylan FC2920 and Tylan FC2921 MFCs respectively. The Tylan FC2920 MFCs consist of a thermal gas flow sensor, adjustable bypass flow splitter, adjustable solenoid control valve and electronics.

Download PDF Catalog

Tylan FC-2925/FM-3925 Series

Process Values
The Tylan FC2925 mass flow controllers accurately and reliably measure and control the mass flow rate of gases up to 1000 slm (2100 scfh) of nitrogen equivalents. The Tylan FM3925 mass flowmeters operate over the same flow range and at pressures up to 500 psig. The Tylan FC2925 MFC and Tylan FM3925 flowmeter are equipped with a card edge connector. The Tylan FC2926 MFC and Tylan FM3926 flowmeter are available with a 15 pin subminiature D connector and optional 4 - 20 mA DC input and output signals, 0 - 5 VDC is standard. The Tylan FC2925 mass flow controller consists of a thermal gas flow sensor, bypass flow splitter, pilot-operated control valve and electronics.

Download PDF Catalog

Tylan FC-4900 Series Vapor Controllers

Process Values
Celerity`s FC4900 vapor controllers are designed specifically to meet the exacting requirements of today`s semiconductor and industrial processes. The FC4900 vapor controller enables the delivery of organometallics such as tetraethoxsilane(TEOS), trimethylphosphate(TMP) and trimethylborate(TMB) with pressure drops as low as 6.75 kPa (50Torr).

Download PDF Catalog