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Deposition Monitors

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STM-100/MF Thickness Monitor

The Model STM-100/MF Thickness/Rate Monitor from Sycon Instruments, Inc. is a precision mass and film thickness measurement instrument for use in thin film deposition processes and other quartz crystal microbalance applications. The STM-100/MF has proven very tough and reliable. Thousands of durable units are providing stable monitoring of depositions. Easy to setup and use, the STM-100/MF has a history that makes it the one to have for deposition monitoring.

● Multi-Film Program Storage
● High Resolution and High Speed Measurement Engine
● 1 Å Thickness Resolution
● 0.1 Å/Sec. Rate Resolution
● 4 measurements per second
● Multiple function high readability Back-lit LCD
● Shutter and Limit I/O Relay Outputs
● Analog Output of Rate or Thickness ±0 to 10V 12 bit resolution
● Low Maintenance Sensor Design
● Industry Standard 6 MHz Sensing Crystal
● RS-232 Interface
● LabVIEWTM Front Panel Interface

ACCESSORIES
● Front Load Single Sensor
● Oscillator Kits (Include Oscillator and Cable)
    783-500-109-10 : 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m
    (10 ft.) BNC cable

item code : STM-100/MF

Download PDF Catalog
Download PDF Manual
product spec
Multi Mode Operation :
(1)Thickness/Rate Monitor
(2)Negative Thickness Monitor
(3)Sensor Frequency Monitor

High Speed : Four Measurements per second
High Resolution : 0.1Å per second
High Accuracy : ±0.5% thickness ±1 count
Measurement Range : 500KÅ Aluminum Equivalent

Relay Output : Four 1.5 Amp SPST N.O. Contacts
1) Shutter Control, 2) Thickness Set point, 3) Timer Set point, 4) Crystal Failure

Remote Input : Four TTL Compatible inputs
1) Open Shutter, 2) Close Shutter, 3) Zero Thickness, 4) Zero Time

Setpoints
(1) End Thickness : 0.000 to 9999KÅ
(2) Setpoint Thickness : 0.000 to 9999KÅ
(3) Timer : 00:00 to 99:59 m:s

Power Requirement : 120/240 VAC 50/60 Hz 2.5 VA

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