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Deposition Monitors

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STM-2XM 2-Channel Rate/Thickness Monitor

STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price.

STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors.

Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1).

● Two measurement channels
● Four analog outputs for rate, rate deviation, or thickness
● Eight programmable digital inputs
● Eight programmable digital outputs
● High accuracy at 10 readings per second
● Displays mass or thickness
● Codeposition monitoring capabilities

ACCESSORIES
● Front Load Single Sensor
● Oscillator Kits (Include Oscillator and Cable)
    783-500-109-10 : 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m
    (10 ft.) BNC cable

item code : STM-2XM 2-Channel Rate/Thickness Monitor

Download PDF Catalog
Download PDF Manual
product spec
Type : STM-2XM
Compatible sensors : Single/shuttered single or dual QCM sensor
Sensor inputs : Two
Measurement frequency range : 6.0 to 5.0 MHz (fixed)
Frequency resolution : ±0.03 MHz at 6 MHz
Reference frequency stability : ±2 ppm
Thickness and rate resolution/measurement :
±0.037 Å @ tooling/density = 100/1, fundamental frequency = 6 MHz
Measurement interval : 0.10 s
Stored films : 15
Display mode : Thickness/Mass
Digital inputs : Eight
Digital outputs : Eight
Analog outputs : Four
Analog output rating : 0 to +/-10 V, 10 mA
Relay rating : Up to 48 V (dc) • V (ac), 2A
Power requirement : 120/240, 50/60 Hz, 2.5 VA

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